During the early days, DC source was chosen to be the excitation energy in within the semiconductor industry. This is because DC sources are relatively low cost, but with low accuracy. However, it was more than sufficient to meet the accuracy requirements of early semiconductor integrated circuit manufacturing processes. Now, with the continuous advancement of science & technology and manufacturing techniques, manufacturers are now favoring RF sources over DC as the excitation energy due to its stability and accuracy, which can ensure the reliability of the excitation energy link.
During the manufacturing of semiconductors, RF energy directly determines the characteristics of plasma within the reaction chamber. Meanwhile, during the semiconductors’ manufacturing process, the reliability of whichever process will affect the final yield. For example, if even a slight deviation occurs in any process of a 20-day cycle wafer production, it may eventually cause serious problems such as lattice damage, which would result in a large number of defective wafers.
As one of the links in the chain of industries, it is crucial that the output of the RF power supply is maintained at a stable rate. Apart from that, the application of RF power supply is etching, coating and some other processes is very extensive, and the possible issues of RF directly restricts the manufacturing process and efficiency.
During the installation verification and daily operation of new equipment, BIRD’s RF calibration kit would be needed to verify and correct the output consistency of the RF power supply; When a machine equipment fails, BIRD’s RF calibration kit will be needed to carry out the troubleshooting process.
