Precision Oil-Cooled Dummy Load

In order to maintain the idea repeatability and consistency during the manufacturing process, modern plasma technologies require the use of highly precise RF Power Regulators and Control. The key part to ensuring the accuracy and repeatability of the RF Power Input into the Vacuum Chamber is the calibration, operating procedures and standards for daily monitoring.

BIRD provides ultra-stable, low VSWR, and Dummy Loads that’s targeted at the transmission of power outputs that can be achieved using BIRD’s Precision Power Sensor for fast and accurate measurements. When it is used in a rated area, the total variation range of the Dummy Load’s VSWR can be kept within 0.1 dB. Dummy Loads can be calibrated at various time cycles with excellent repeatability and zero requirement for preheating. This can greatly reduce the calibration error and obtain a more stable control over the critical process variables.